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Deep reactive ion etching - ScienceDirect
Figure 1 from Ultra Deep Reactive Ion Etching of High Aspect-Ratio
Glass based micro total analysis systems: Materials, fabrication
Micromachines, Free Full-Text
Optimization of deep reactive ion etching for microscale silicon
Micromachines, Free Full-Text
PDF) Metal assisted chemical etching for high aspect ratio
PDF) Towards the Fabrication of High-Aspect-Ratio Silicon Gratings
Optimization of deep reactive ion etching for microscale silicon
Enhanced metal assisted etching method for high aspect ratio